Used in the production of thin films for electronic and optical devices, it serves as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. It is also employed in the synthesis of advanced ceramics and coatings, enhancing their thermal and chemical stability. Additionally, it plays a role in catalysis for organic reactions, particularly in polymerization processes. Its application in nanotechnology is significant for creating nanostructured materials with tailored properties.