Used as a silylating agent in organic synthesis, particularly for the protection of hydroxyl groups in alcohols and phenols. Its bulky tert-butyl groups provide steric hindrance, offering selectivity in multifunctional molecules. Commonly employed in the preparation of silicon-based polymers and as an intermediate in the synthesis of silane coupling agents for surface modification of inorganic materials. Also utilized in the fabrication of semiconductor devices and thin films through chemical vapor deposition processes due to its thermal stability and reactivity.