Used as a precursor in the synthesis of silicon-based polymers and ceramics, particularly in the production of silicon carbide at high temperatures. It serves as a reagent in organosilicon chemistry due to its stable cyclic structure, enabling controlled ring-opening reactions. Also employed in the development of specialty coatings and thin films via chemical vapor deposition (CVD) processes, where it contributes to forming silicon-rich layers with thermal stability. Its volatility and thermal decomposition properties make it suitable for use in semiconductor manufacturing and advanced material research.