Used primarily as an intermediate in the synthesis of silicon-based materials, including silicon carbide and silica coatings through chemical vapor deposition processes. It serves as a precursor in the production of specialty glasses and ceramics due to its ability to introduce silicon atoms upon thermal decomposition. Also employed in research settings for the development of organosilicon compounds with applications in polymers, adhesives, and surface modification agents. Its volatility and reactivity make it suitable for gas-phase reactions in semiconductor and coating industries.