Used as a silylating agent in organic synthesis, particularly in the preparation of silicon-containing compounds for pharmaceuticals and agrochemicals. It serves as a key intermediate in the synthesis of silane coupling agents, which improve adhesion between organic and inorganic materials in coatings, adhesives, and composites. Its reactivity makes it valuable in vapor deposition processes for semiconductor manufacturing, where it contributes to forming silicon-based thin films. Additionally, it is employed in the production of specialty silicones with enhanced thermal and oxidative stability for use in high-performance materials.