Copper(I) hexafluoro-2,4-pentanedionate 2-butyne complex
Reagent
Code: #157127
CAS Number
137007-13-7
blur_circular Chemical Specifications
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Molecular Information
Weight
324.69 g/mol
Formula
C₉H₇CuF₆O₂
thermostat
Physical Properties
Melting Point
68-73 °C
Boiling Point
40 °C at 0.1 mmHg
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Storage & Handling
Storage
2-8°C
description Product Description
Used as a precursor in metal-organic chemical vapor deposition (MOCVD) for depositing copper thin films in semiconductor manufacturing. Its volatility and thermal stability allow for precise, low-temperature deposition, making it suitable for advanced microelectronic devices where copper acts as a conductive layer. The complex helps achieve high-purity, uniform coatings essential in integrated circuits and printed circuit boards. It is favored in applications requiring minimal carbon contamination due to its clean decomposition profile.
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