Tris(4-tert-butylphenyl)sulfonium triflate

≥99% trace metals basis

Reagent Code: #73443
label
Alias Tris(4-tert-butylphenyl)sulfur trifluoromethanesulfonate
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CAS Number 134708-14-8

blur_circular Chemical Specifications

scatter_plot Molecular Information
Weight 580.76 g/mol
Formula C₃₁H₃₉F₃O₃S₂
badge Registry Numbers
MDL Number MFCD02683475
thermostat Physical Properties
Melting Point 250 - 253 °C
inventory_2 Storage & Handling
Storage room temperature

description Product Description

This chemical is primarily used as a photoacid generator (PAG) in photolithography processes, particularly in the manufacturing of semiconductors and microelectronics. When exposed to ultraviolet (UV) light, it generates strong acids that catalyze the cross-linking or deprotection of polymers in photoresist materials. This enables the precise patterning of circuits on silicon wafers, which is critical for producing high-performance electronic devices. Its thermal stability and efficiency in acid generation make it suitable for advanced lithography techniques, including deep UV (DUV) and extreme UV (EUV) lithography. Additionally, it is employed in the development of advanced materials for coatings and imaging applications due to its ability to initiate chemical reactions upon light exposure.

shopping_cart Available Sizes & Pricing

Size Availability Unit Price Quantity
inventory 250mg
10-20 days ฿17,730.00
inventory 50mg
10-20 days ฿6,984.00

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