5,7-Di-tert-butyl-3-phenylbenzo[d]oxazol-3-ium tetrafluoroborate
97%
Reagent
Code: #64398
CAS Number
1207294-92-5
blur_circular Chemical Specifications
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Molecular Information
Weight
395.24 g/mol
Formula
C₂₁H₂₆BF₄NO
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Storage & Handling
Storage
Room temperature, dark, inert gas
description Product Description
This chemical is primarily utilized as a photoacid generator (PAG) in various photolithography processes, particularly in the manufacturing of semiconductors and microelectronics. When exposed to ultraviolet (UV) light, it releases acid, which is essential for patterning and developing photoresist materials on silicon wafers. Its stability and efficiency under UV exposure make it suitable for high-resolution imaging in advanced technology nodes. Additionally, it finds application in the synthesis of specialty polymers and coatings, where controlled acid generation is required for curing or cross-linking processes.
format_list_bulleted Product Specification
| Test Parameter | Specification |
|---|---|
| Appearance | White Powder |
| Purity (%) | 96.5-100 |
| Infrared Spectrum | Conforms to Structure |
| NMR | Conforms to Structure |
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