(Cyclopentadienyl)(triethylphosphine)copper
98%
science Other reagents with same CAS 12261-30-2
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description Product Description
Used as a precursor in vapor deposition processes to form copper-containing thin films for semiconductor and microelectronic applications. Its volatility and thermal stability make it suitable for chemical vapor deposition (CVD) and atomic layer deposition (ALD), where uniform, high-purity copper layers are needed in integrated circuits and advanced interconnects. Also employed in research for catalytic applications involving copper-based complexes.
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