Used primarily in the semiconductor industry as a precursor for chemical vapor deposition (CVD) processes to produce thin films of silicon-containing materials. It is also employed in the synthesis of organosilicon compounds, which are crucial in the production of silicone polymers and resins. Additionally, it serves as a key intermediate in the manufacture of specialty chemicals used in surface treatments and coatings, enhancing properties like water repellency and durability. Its role in creating high-purity silicon-based materials makes it valuable in advanced electronics and photovoltaics.