Used primarily as a silylating agent in analytical chemistry, especially in gas chromatography (GC) and mass spectrometry (MS). It efficiently introduces silyl groups to hydroxyl, amino, and other active hydrogen-containing functional groups in organic molecules, enhancing their volatility and thermal stability for better GC separation and detection. Its trifluoroacetamide structure increases reactivity compared to standard silylating reagents, allowing faster derivatization under mild conditions. Commonly applied in the analysis of steroids, drugs, and metabolites in biological samples. Also useful in protecting functional groups during multi-step organic synthesis due to the selectivity and ease of removal of the diethylsilyl group.