Hexamethyl disilylamine (HMDS)
AR,98%
Reagent
Code: #87982
Alias
Hexamethyldisilazane; Hexamethyldisilazane, Hexamethyldisilazane
CAS Number
999-97-3
science Other reagents with same CAS 999-97-3
blur_circular Chemical Specifications
scatter_plot
Molecular Information
Weight
161.39 g/mol
Formula
C₆H₁₉NSi₂
badge
Registry Numbers
EC Number
213-668-5
MDL Number
MFCD00008259
thermostat
Physical Properties
Melting Point
-78 °C
Boiling Point
125 °C(lit.)
inventory_2
Storage & Handling
Density
0.774 g/mL at 25 °C(lit.)
Storage
Room temperature, cool, filled with argon
description Product Description
Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.
format_list_bulleted Product Specification
| Test Parameter | Specification |
|---|---|
| Purity | 98-100 |
| Refractive Index (20°C) | 1.4069-1.4089 |
| Appearance | Colorless liquid |
shopping_cart Available Sizes & Pricing
Cart
No products
Subtotal:
0.00
Total
0.00
THB