Hexamethyl disilylamine (HMDS)

AR,98%

Reagent Code: #87982
label
Alias Hexamethyldisilazane; Hexamethyldisilazane, Hexamethyldisilazane
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CAS Number 999-97-3

science Other reagents with same CAS 999-97-3

blur_circular Chemical Specifications

scatter_plot Molecular Information
Weight 161.39 g/mol
Formula C₆H₁₉NSi₂
badge Registry Numbers
EC Number 213-668-5
MDL Number MFCD00008259
thermostat Physical Properties
Melting Point -78 °C
Boiling Point 125 °C(lit.)
inventory_2 Storage & Handling
Density 0.774 g/mL at 25 °C(lit.)
Storage Room temperature, cool, filled with argon

description Product Description

Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.

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Test Parameter Specification
Purity 98-100
Refractive Index (20°C) 1.4069-1.4089
Appearance Colorless liquid

shopping_cart Available Sizes & Pricing

Size Availability Unit Price Quantity
inventory 25ml
10-20 days ฿310.00
inventory 100ml
10-20 days ฿590.00
inventory 250ml
10-20 days ฿1,380.00
inventory 500ml
10-20 days ฿2,750.00
inventory 2.5L
10-20 days ฿9,680.00

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Hexamethyl disilylamine (HMDS)
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Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.
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