Used as a precursor in the chemical vapor deposition (CVD) process to produce thin films of aluminum oxide, which are essential in semiconductor manufacturing and protective coatings. It also serves as a catalyst in organic synthesis, particularly in polymerization reactions, due to its stability and reactivity. Additionally, it is employed in the production of advanced materials, such as ceramics and nanocomposites, where precise control over aluminum content is required. Its role in creating high-performance optical coatings is also notable, enhancing the durability and efficiency of optical devices.