Tetrakis(dimethylamino)titanium(IV)
≥97%
Reagent
Code: #68474
CAS Number
3275-24-9
science Other reagents with same CAS 3275-24-9
blur_circular Chemical Specifications
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Molecular Information
Weight
224.18 g/mol
Formula
C₈H₂₄N₄Ti
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Registry Numbers
MDL Number
MFCD00014861
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Storage & Handling
Storage
Room temperature, dry, sealed, stored in nitrogen
description Product Description
Used as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes for depositing ultra-thin titanium-containing films, such as titanium nitride (TiN) and titanium dioxide (TiO2). These films are essential in semiconductor manufacturing for diffusion barriers, high-k dielectrics, and gate electrodes in advanced microelectronics. It is also utilized in research and development for synthesizing novel titanium-based nanomaterials with applications in catalysis, energy storage, and nanotechnology.
format_list_bulleted Product Specification
| Test Parameter | Specification |
|---|---|
| Appearance | Light yellow to brown clear liquid |
| Purity | 96.5-100 |
| Infrared Spectrum | Conforms to Structure |
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