Hafnium(IV) fluoride
99.9% metals basis
Reagent
Code: #193733
Alias
Hafnium tetrafluoride
CAS Number
13709-52-9
blur_circular Chemical Specifications
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Molecular Information
Weight
254.48 g/mol
Formula
HfF₄
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Registry Numbers
EC Number
237-258-0
MDL Number
MFCD00016127
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Physical Properties
Melting Point
310°C (subl.)
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Storage & Handling
Storage
Room temperature, dry, sealed
description Product Description
Used primarily in the semiconductor industry as a precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes to form hafnium-containing dielectric films. These high-k dielectric materials are critical in modern microelectronics, especially in the gate stacks of advanced transistors, enabling improved performance and reduced leakage current in integrated circuits. Also employed in the production of specialty optical coatings due to its high refractive index and resistance to radiation damage. Additionally, finds use in nuclear reactor applications as a neutron absorber when incorporated into control rods or shielding materials.
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