N,N,O-Tris(trimethylsilyl)hydroxylamine is primarily used in organic synthesis as a silylating agent. It is particularly valuable in the protection of hydroxyl and amino groups during complex chemical reactions, ensuring these groups remain unreactive while other parts of the molecule undergo transformation. This compound is also employed in the preparation of silyl ethers and silyl amines, which are intermediates in the synthesis of pharmaceuticals, agrochemicals, and specialty chemicals. Additionally, it plays a role in the modification of surfaces and materials, enhancing their properties for specific industrial applications. Its ability to introduce trimethylsilyl groups makes it a versatile reagent in various chemical processes.