Used as an anti-reflective coating in optical devices such as lenses and solar panels due to its low refractive index and high transparency in the ultraviolet range. Commonly applied in thin-film form through vapor deposition. Also serves as a durable window material in infrared and UV spectroscopy equipment because of its resistance to harsh environments. Employed in some types of lasers and optical filters for its transmission properties across a wide wavelength range. Additionally, utilized in the semiconductor industry to control properties of thin films and as a fluoride source in the production of certain metal alloys.