Ethyldiphenylsulfonium tetrafluoroborate
97%
Reagent
Code: #184882
CAS Number
893-69-6
science Other reagents with same CAS 893-69-6
blur_circular Chemical Specifications
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Molecular Information
Weight
302.14 g/mol
Formula
C₁₄H₁₅BF₄S
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Storage & Handling
Storage
Room temperature, seal, dry, light-proof
description Product Description
Used primarily as a photoacid generator (PAG) in advanced photoresist formulations for semiconductor manufacturing. Upon exposure to deep ultraviolet (DUV) or extreme ultraviolet (EUV) light, it releases strong acids that catalyze chemical transformations in the resist, enabling precise pattern development during photolithography. Its thermal stability and efficient acid generation make it suitable for high-resolution patterning in microelectronics fabrication. Also employed in cationic polymerization processes where controlled initiation is required under light exposure.
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