Ethyldiphenylsulfonium tetrafluoroborate

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Reagent Code: #184882
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CAS Number 893-69-6

science Other reagents with same CAS 893-69-6

blur_circular Chemical Specifications

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Weight 302.14 g/mol
Formula C₁₄H₁₅BF₄S
inventory_2 Storage & Handling
Storage Room temperature, seal, dry, light-proof

description Product Description

Used primarily as a photoacid generator (PAG) in advanced photoresist formulations for semiconductor manufacturing. Upon exposure to deep ultraviolet (DUV) or extreme ultraviolet (EUV) light, it releases strong acids that catalyze chemical transformations in the resist, enabling precise pattern development during photolithography. Its thermal stability and efficient acid generation make it suitable for high-resolution patterning in microelectronics fabrication. Also employed in cationic polymerization processes where controlled initiation is required under light exposure.

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Size Availability Unit Price Quantity
inventory 250mg
10-20 days ฿6,450.00
inventory 1g
10-20 days ฿16,970.00
inventory 5g
10-20 days ฿69,280.00
inventory 100mg
10-20 days ฿4,310.00

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Ethyldiphenylsulfonium tetrafluoroborate
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Used primarily as a photoacid generator (PAG) in advanced photoresist formulations for semiconductor manufacturing. Upon exposure to deep ultraviolet (DUV) or extreme ultraviolet (EUV) light, it releases strong acids that catalyze chemical transformations in the resist, enabling precise pattern development during photolithography. Its thermal stability and efficient acid generation make it suitable for high-resolution patterning in microelectronics fabrication. Also employed in cationic polymerization processes where controlled initiation is required under light exposure.
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