Used in the production of gallium-based semiconductors, particularly in metal-organic chemical vapor deposition (MOCVD) processes for manufacturing LED and laser diode materials. Serves as a precursor for synthesizing gallium fluoride films, which have applications in optical coatings due to their low refractive index and high transparency in the ultraviolet and vacuum ultraviolet regions. Employed in research for fluoride ion conductors and solid-state electrolytes in advanced battery technologies. Also utilized in the preparation of catalysts for organic transformations involving fluorination.