Used in the production of silicon-based polymers and materials, particularly in the semiconductor industry for thin film deposition. It serves as a precursor in chemical vapor deposition (CVD) processes to create silicon carbide or silicon nitride coatings, which enhance the durability and performance of electronic components. Additionally, it finds application in organic synthesis for constructing silacyclobutane rings, which are valuable intermediates in the development of pharmaceuticals and specialty chemicals. Its reactivity and structure make it a key component in advanced material science and nanotechnology research.